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電子微量天平
Specification : Resolution 1/60,000
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磁石加熱攪拌器
Specification : Stirring hot plates (Model PC-420D shown) can regulate temperatures up to 550°C while stirring at speeds up to 1150 RPM.
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自動滴定儀
Specification : Resolution 0.001pH, 0.1mV, 0.1C
Measurement interval : 100ms -
水分測定儀
Specification : Resolution 1/10,000
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液相層析儀
Specification : Resolution ±0.8nm at 529.0 nm
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感應藕合電漿質譜儀 (3 Party)
Specification : Measure 1~ 31 metals in solution
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200L/ 20L /4L 包裝充填區
Fill to 200L/ 20L /4L packaged
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混合藥液儲槽體
Mixing two or three solutions in tank
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原料卸載區 (供料)
Load materials to mixing tank
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TMAH 轉充填設備
Transfer tote to lorry packaged
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TMAH 藥液與氮氣充填口
Fill gate of TMAH and N gas
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TMAH 藥液取樣口
Collect TMAH sample from lorry
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TMAH 氣動泵浦與濾心
Filter Specification : Pore Size: 0.5 and 0.2um
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超純水系統
Specification：trace metal＜1 ppb
Capacity：4 MTPH -
超純水設備
多層過濾器、活性碳過濾器、軟水桶過濾器、RO模組、 EDI模組、拋光樹脂塔(精製)
